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+\documentclass{article}
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+\usepackage[pdftex,active,tightpage]{preview}
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+\setlength\PreviewBorder{2mm}
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+\usepackage{tikz}
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+\usetikzlibrary{shapes, calc}
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+\tikzstyle{vertex}=[draw,fill=black!15,rectangle,minimum size=20pt,inner sep=10pt]
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+
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+\begin{document}
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+\begin{preview}
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+\begin{tikzpicture}[font=\sffamily,thick,level/.style={sibling distance=120mm/#1}]
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+ \node[vertex] {Halbleiterspeicher}
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+ child {
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+ node[vertex] {Festwertspeicher}
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+ child {
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+ node[vertex] {Irreversibel}
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+ child { node[vertex] {ROM} }
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+ child { node[vertex] {PROM} }
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+ }
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+ child {
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+ node[vertex] {Reversibel}
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+ child { node[vertex] {EPROM} }
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+ child { node[vertex] {EEPROM} }
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+ }
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+ } child {
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+ node[vertex] {Schreib- / Lese-Speicher}
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+ child { node[vertex] {Statisches RAM} }
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+ child { node[vertex] {Dynamisches RAM} }
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+ }
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+ ;
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+\end{tikzpicture}
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+\end{preview}
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+\end{document}
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